I'm exploring the function to auto parsing KLARF file from defect scan tool to wafer defect scaned map then we can use these map to do all sorts of work just like AI image comparison...etc
I have moved all defect map draw into a folder. Note that AI image classification is very important for each everywhere:
Even in the semiconductor, it's more important for us,it can instead of engineers' manual handle in your working section or department. Such as worse or special map distinguish or previous case search. This project has subfolders corresponding to the languages:
- Python 3.5 above
- JavaScript
- HTML5
Feel free to begin converting this function into your project. But first, a few guidelines:
- Semiconductor knowledge. pls make sure that you understand what's KLARF file?
Came from Semicondutor defect scanning tool's output file for server parsing or others just like that.There's sorts of parameters to indicate the wafer which was scan is good or NG for defect performance. And this KLARF file should be help for EDA software to draw or create the visual defect scaned map.
FileVersion 1 1;
FileTimestamp 10-19-21 10:06:32;
InspectionStationID "AMAT" "COMPLUS 3T" "HYCPS04";
SampleType WAFER;
ResultTimestamp 10-19-21 10:04:09;
LotID "HJU008";
SampleSize 1 200;
SetupID "03R3" 10-19-21 10:03:42;
StepID "IMD2_SRO";
SampleOrientationMarkType NOTCH;
OrientationMarkLocation DOWN;
DiePitch 2.4899600000e+03 2.2599200000e+03;
DieOrigin 0.000000 0.000000;
WaferID "25";
Slot 25;
SampleCenterLocation 2.3948000000e+03 2.0903200000e+03;
ClassLookup 276
0 "Undefined"
1 "0.2_open"
2 "0.3_open"
3 "0.4_open"
4 "0.5_open"
5 "0.6_open"
6 "0.7_open"
7 "0.8_open"
8 "0.2_open_u"
9 "0.3_open_u"
10 "0.4_open_u"
11 "0.5_open_u"
12 "0.6_open_u"
13 "0.7_open_u"
14 "0.8_open_u"
15 "0.2_short"
16 "0.3_short"
17 "0.4_short"
18 "0.5_short"
19 "0.6_short"
20 "0.7_short"
21 "0.8_short"
22 "0.2_short_u"
23 "0.3_short_u"
24 "0.4_short_u"
25 "0.5_short_u"
26 "0.6_short_u"
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31 "0.4_intrusion"
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41 "0.7_protrusion"
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91 "TUNE-true"
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93 "TUNE-to_be_masked"
94 "100nm"
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97 "400nm"
98 "500nm"
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170 "undefined_170"
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175 "undefined_175"
176 "undefined_176"
177 "undefined_177"
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180 "undefined_180"
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182 "undefined_182"
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202 "PrevEmbPart"
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204 "undefined_204"
205 "undefined_205"
206 "undefined_206"
207 "undefined_207"
208 "NonVisual"
209 "undefined_209"
210 "undefined_210"
211 "undefined_211"
212 "undefined_212"
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215 "undefined_215"
216 "undefined_216"
217 "undefined_217"
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247 "undefined_247"
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250 "undefined_250"
251 "undefined_251"
252 "undefined_252"
253 "undefined_253"
254 "undefined_254"
255 "undefined_255"
1001 "Group1"
1002 "Group2"
1003 "Group3"
1004 "Group4"
1005 "Group5"
1006 "Group6"
1007 "Group7"
1008 "Group8"
1009 "Group9"
1010 "Group10"
1011 "Group11"
1012 "Group12"
1013 "Group13"
1014 "Group14"
1015 "Group15"
1016 "Group16"
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1018 "Group18"
1019 "Group19"
1020 "Group20";
InspectionTest 1;
SampleTestPlan 4988
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1 14
1 15
1 16
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1 18
1 19
1 20
1 21
1 22
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1 24
1 25
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3 13
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3 15
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4 11
4 12
4 13
4 14
4 15
4 16
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4 19
4 20
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5 -40
5 -39
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6 -40
6 -39
6 -38
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6 13
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6 24
6 25
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6 27
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6 32
6 33
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6 42
7 -40
7 -39
7 -38
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7 23
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8 -40
8 -39
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8 32
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9 -40
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9 34
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9 41
10 -40
10 -39
10 -38
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10 15
10 16
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10 19
10 20
10 21
10 22
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10 24
10 25
10 26
10 27
10 28
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10 32
10 33
10 34
10 35
10 36
10 37
10 38
10 39
10 40
10 41
11 -40
11 -39
11 -38
11 -37
11 -36
11 -35
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11 0
11 1
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11 5
11 6
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11 8
11 9
11 10
11 11
11 12
11 13
11 14
11 15
11 16
11 17
11 18
11 19
11 20
11 21
11 22
11 23
11 24
11 25
11 26
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11 28
11 29
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11 32
11 33
11 34
11 35
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11 38
11 39
11 40
11 41
12 -39
12 -38
12 -37
12 -36
12 -35
12 -34
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12 -31
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12 1
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12 11
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12 13
12 14
12 15
12 16
12 17
12 18
12 19
12 20
12 21
12 22
12 23
12 24
12 25
12 26
12 27
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12 31
12 32
12 33
12 34
12 35
12 36
12 37
12 38
12 39
12 40
13 -39
13 -38
13 -37
13 -36
13 -35
13 -34
13 -33
13 -32
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13 -13
13 -12
13 -11
13 -10
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13 -2
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13 1
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13 7
13 8
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13 11
13 12
13 13
13 14
13 15
13 16
13 17
13 18
13 19
13 20
13 21
13 22
13 23
13 24
13 25
13 26
13 27
13 28
13 29
13 30
13 31
13 32
13 33
13 34
13 35
13 36
13 37
13 38
13 39
13 40
14 -39
14 -38
14 -37
14 -36
14 -35
14 -34
14 -33
14 -32
14 -31
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14 -12
14 -11
14 -10
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14 0
14 1
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14 12
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14 15
14 16
14 17
14 18
14 19
14 20
14 21
14 22
14 23
14 24
14 25
14 26
14 27
14 28
14 29
14 30
14 31
14 32
14 33
14 34
14 35
14 36
14 37
14 38
14 39
15 -38
15 -37
15 -36
15 -35
15 -34
15 -33
15 -32
15 -31
15 -30
15 -29
15 -28
15 -27
15 -26
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15 -24
15 -23
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15 -14
15 -13
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15 -11
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15 -8
15 -7
15 -6
15 -5
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15 -3
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15 0
15 1
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15 3
15 4
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15 11
15 12
15 13
15 14
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15 16
15 17
15 18
15 19
15 20
15 21
15 22
15 23
15 24
15 25
15 26
15 27
15 28
15 29
15 30
15 31
15 32
15 33
15 34
15 35
15 36
15 37
15 38
15 39
16 -38
16 -37
16 -36
16 -35
16 -34
16 -33
16 -32
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16 13
16 14
16 15
16 16
16 17
16 18
16 19
16 20
16 21
16 22
16 23
16 24
16 25
16 26
16 27
16 28
16 29
16 30
16 31
16 32
16 33
16 34
16 35
16 36
16 37
16 38
16 39
17 -37
17 -36
17 -35
17 -34
17 -33
17 -32
17 -31
17 -30
17 -29
17 -28
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17 -17
17 -16
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17 -13
17 -12
17 -11
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17 0
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17 2
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17 5
17 6
17 7
17 8
17 9
17 10
17 11
17 12
17 13
17 14
17 15
17 16
17 17
17 18
17 19
17 20
17 21
17 22
17 23
17 24
17 25
17 26
17 27
17 28
17 29
17 30
17 31
17 32
17 33
17 34
17 35
17 36
17 37
17 38
18 -37
18 -36
18 -35
18 -34
18 -33
18 -32
18 -31
18 -30
18 -29
18 -28
18 -27
18 -26
18 -25
18 -24
18 -23
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18 -20
18 -19
18 -18
18 -17
18 -16
18 -15
18 -14
18 -13
18 -12
18 -11
18 -10
18 -9
18 -8
18 -7
18 -6
18 -5
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18 0
18 1
18 2
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18 5
18 6
18 7
18 8
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18 10
18 11
18 12
18 13
18 14
18 15
18 16
18 17
18 18
18 19
18 20
18 21
18 22
18 23
18 24
18 25
18 26
18 27
18 28
18 29
18 30
18 31
18 32
18 33
18 34
18 35
18 36
18 37
19 -36
19 -35
19 -34
19 -33
19 -32
19 -31
19 -30
19 -29
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19 -26
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19 -23
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19 -11
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19 1
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19 10
19 11
19 12
19 13
19 14
19 15
19 16
19 17
19 18
19 19
19 20
19 21
19 22
19 23
19 24
19 25
19 26
19 27
19 28
19 29
19 30
19 31
19 32
19 33
19 34
19 35
19 36
19 37
20 -35
20 -34
20 -33
20 -32
20 -31
20 -30
20 -29
20 -28
20 -27
20 -26
20 -25
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20 -23
20 -22
20 -21
20 -20
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20 -16
20 -15
20 -14
20 -13
20 -12
20 -11
20 -10
20 -9
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20 0
20 1
20 2
20 3
20 4
20 5
20 6
20 7
20 8
20 9
20 10
20 11
20 12
20 13
20 14
20 15
20 16
20 17
20 18
20 19
20 20
20 21
20 22
20 23
20 24
20 25
20 26
20 27
20 28
20 29
20 30
20 31
20 32
20 33
20 34
20 35
20 36
21 -35
21 -34
21 -33
21 -32
21 -31
21 -30
21 -29
21 -28
21 -27
21 -26
21 -25
21 -24
21 -23
21 -22
21 -21
21 -20
21 -19
21 -18
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21 -16
21 -15
21 -14
21 -13
21 -12
21 -11
21 -10
21 -9
21 -8
21 -7
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21 -5
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21 -3
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21 0
21 1
21 2
21 3
21 4
21 5
21 6
21 7
21 8
21 9
21 10
21 11
21 12
21 13
21 14
21 15
21 16
21 17
21 18
21 19
21 20
21 21
21 22
21 23
21 24
21 25
21 26
21 27
21 28
21 29
21 30
21 31
21 32
21 33
21 34
21 35
21 36
22 -34
22 -33
22 -32
22 -31
22 -30
22 -29
22 -28
22 -27
22 -26
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22 -24
22 -23
22 -22
22 -21
22 -20
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22 -18
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22 -16
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22 -12
22 -11
22 -10
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22 -5
22 -4
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22 0
22 1
22 2
22 3
22 4
22 5
22 6
22 7
22 8
22 9
22 10
22 11
22 12
22 13
22 14
22 15
22 16
22 17
22 18
22 19
22 20
22 21
22 22
22 23
22 24
22 25
22 26
22 27
22 28
22 29
22 30
22 31
22 32
22 33
22 34
22 35
23 -33
23 -32
23 -31
23 -30
23 -29
23 -28
23 -27
23 -26
23 -25
23 -24
23 -23
23 -22
23 -21
23 -20
23 -19
23 -18
23 -17
23 -16
23 -15
23 -14
23 -13
23 -12
23 -11
23 -10
23 -9
23 -8
23 -7
23 -6
23 -5
23 -4
23 -3
23 -2
23 -1
23 0
23 1
23 2
23 3
23 4
23 5
23 6
23 7
23 8
23 9
23 10
23 11
23 12
23 13
23 14
23 15
23 16
23 17
23 18
23 19
23 20
23 21
23 22
23 23
23 24
23 25
23 26
23 27
23 28
23 29
23 30
23 31
23 32
23 33
23 34
24 -32
24 -31
24 -30
24 -29
24 -28
24 -27
24 -26
24 -25
24 -24
24 -23
24 -22
24 -21
24 -20
24 -19
24 -18
24 -17
24 -16
24 -15
24 -14
24 -13
24 -12
24 -11
24 -10
24 -9
24 -8
24 -7
24 -6
24 -5
24 -4
24 -3
24 -2
24 -1
24 0
24 1
24 2
24 3
24 4
24 5
24 6
24 7
24 8
24 9
24 10
24 11
24 12
24 13
24 14
24 15
24 16
24 17
24 18
24 19
24 20
24 21
24 22
24 23
24 24
24 25
24 26
24 27
24 28
24 29
24 30
24 31
24 32
24 33
25 -31
25 -30
25 -29
25 -28
25 -27
25 -26
25 -25
25 -24
25 -23
25 -22
25 -21
25 -20
25 -19
25 -18
25 -17
25 -16
25 -15
25 -14
25 -13
25 -12
25 -11
25 -10
25 -9
25 -8
25 -7
25 -6
25 -5
25 -4
25 -3
25 -2
25 -1
25 0
25 1
25 2
25 3
25 4
25 5
25 6
25 7
25 8
25 9
25 10
25 11
25 12
25 13
25 14
25 15
25 16
25 17
25 18
25 19
25 20
25 21
25 22
25 23
25 24
25 25
25 26
25 27
25 28
25 29
25 30
25 31
25 32
26 -31
26 -30
26 -29
26 -28
26 -27
26 -26
26 -25
26 -24
26 -23
26 -22
26 -21
26 -20
26 -19
26 -18
26 -17
26 -16
26 -15
26 -14
26 -13
26 -12
26 -11
26 -10
26 -9
26 -8
26 -7
26 -6
26 -5
26 -4
26 -3
26 -2
26 -1
26 0
26 1
26 2
26 3
26 4
26 5
26 6
26 7
26 8
26 9
26 10
26 11
26 12
26 13
26 14
26 15
26 16
26 17
26 18
26 19
26 20
26 21
26 22
26 23
26 24
26 25
26 26
26 27
26 28
26 29
26 30
26 31
27 -29
27 -28
27 -27
27 -26
27 -25
27 -24
27 -23
27 -22
27 -21
27 -20
27 -19
27 -18
27 -17
27 -16
27 -15
27 -14
27 -13
27 -12
27 -11
27 -10
27 -9
27 -8
27 -7
27 -6
27 -5
27 -4
27 -3
27 -2
27 -1
27 0
27 1
27 2
27 3
27 4
27 5
27 6
27 7
27 8
27 9
27 10
27 11
27 12
27 13
27 14
27 15
27 16
27 17
27 18
27 19
27 20
27 21
27 22
27 23
27 24
27 25
27 26
27 27
27 28
27 29
27 30
28 -28
28 -27
28 -26
28 -25
28 -24
28 -23
28 -22
28 -21
28 -20
28 -19
28 -18
28 -17
28 -16
28 -15
28 -14
28 -13
28 -12
28 -11
28 -10
28 -9
28 -8
28 -7
28 -6
28 -5
28 -4
28 -3
28 -2
28 -1
28 0
28 1
28 2
28 3
28 4
28 5
28 6
28 7
28 8
28 9
28 10
28 11
28 12
28 13
28 14
28 15
28 16
28 17
28 18
28 19
28 20
28 21
28 22
28 23
28 24
28 25
28 26
28 27
28 28
28 29
29 -27
29 -26
29 -25
29 -24
29 -23
29 -22
29 -21
29 -20
29 -19
29 -18
29 -17
29 -16
29 -15
29 -14
29 -13
29 -12
29 -11
29 -10
29 -9
29 -8
29 -7
29 -6
29 -5
29 -4
29 -3
29 -2
29 -1
29 0
29 1
29 2
29 3
29 4
29 5
29 6
29 7
29 8
29 9
29 10
29 11
29 12
29 13
29 14
29 15
29 16
29 17
29 18
29 19
30 -26
30 -25
30 -24
30 -23
30 -22
30 -21
30 -20
30 -19
30 -18
30 -17
30 -16
30 -15
30 -14
30 -13
30 -12
30 -11
30 -10
30 -9
30 -8
30 -7
30 -6
30 -5
30 -4
30 -3
30 -2
30 -1
30 0
30 1
30 2
30 3
30 4
30 5
30 6
30 7
30 8
30 9
30 10
30 11
30 12
30 13
30 14
30 15
30 16
30 17
30 18
30 19
31 -25
31 -24
31 -23
31 -22
31 -21
31 -20
31 -19
31 -18
31 -17
31 -16
31 -15
31 -14
31 -13
31 -12
31 -11
31 -10
31 -9
31 -8
31 -7
31 -6
31 -5
31 -4
31 -3
31 -2
31 -1
31 0
31 1
31 2
31 3
31 4
31 5
31 6
31 7
31 8
31 9
31 10
31 11
31 12
31 13
31 14
31 15
31 16
31 17
31 18
31 19
32 -23
32 -22
32 -21
32 -20
32 -19
32 -18
32 -17
32 -16
32 -15
32 -14
32 -13
32 -12
32 -11
32 -10
32 -9
32 -8
32 -7
32 -6
32 -5
32 -4
32 -3
32 -2
32 -1
32 0
32 1
32 2
32 3
32 4
32 5
32 6
32 7
32 8
32 9
32 10
32 11
32 12
32 13
32 14
32 15
32 16
32 17
32 18
32 19
33 -21
33 -20
33 -19
33 -18
33 -17
33 -16
33 -15
33 -14
33 -13
33 -12
33 -11
33 -10
33 -9
33 -8
33 -7
33 -6
33 -5
33 -4
33 -3
33 -2
33 -1
33 0
33 1
33 2
33 3
33 4
33 5
33 6
33 7
33 8
33 9
33 10
33 11
33 12
33 13
33 14
33 15
33 16
33 17
33 18
33 19
34 -19
34 -18
34 -17
34 -16
34 -15
34 -14
34 -13
34 -12
34 -11
34 -10
34 -9
34 -8
34 -7
34 -6
34 -5
34 -4
34 -3
34 -2
34 -1
34 0
34 1
34 2
34 3
34 4
34 5
34 6
34 7
34 8
34 9
34 10
34 11
34 12
34 13
34 14
34 15
34 16
34 17
34 18
34 19
35 -17
35 -16
35 -15
35 -14
35 -13
35 -12
35 -11
35 -10
35 -9
35 -8
35 -7
35 -6
35 -5
35 -4
35 -3
35 -2
35 -1
35 0
35 1
35 2
35 3
35 4
35 5
35 6
35 7
35 8
35 9
35 10
35 11
35 12
35 13
35 14
35 15
35 16
35 17
35 18
36 -15
36 -14
36 -13
36 -12
36 -11
36 -10
36 -9
36 -8
36 -7
36 -6
36 -5
36 -4
36 -3
36 -2
36 -1
36 0
36 1
36 2
36 3
36 4
36 5
36 6
36 7
36 8
36 9
36 10
36 11
36 12
36 13
36 14
36 15
36 16
37 -12
37 -11
37 -10
37 -9
37 -8
37 -7
37 -6
37 -5
37 -4
37 -3
37 -2
37 -1
37 0
37 1
37 2
37 3
37 4
37 5
37 6
37 7
37 8
37 9
37 10
37 11
37 12
37 13
38 -8
38 -7
38 -6
38 -5
38 -4
38 -3
38 -2
38 -1
38 0
38 1
38 2
38 3
38 4
38 5
38 6
38 7
38 8
38 9;
AreaPerTest 2.3296152996e+10;
DefectRecordSpec 14 DEFECTID XREL YREL XINDEX YINDEX XSIZE YSIZE DEFECTAREA DSIZE CLASSNUMBER TEST ROUGHBINNUMBER IMAGECOUNT IMAGELIST;
DefectList
1 5.5264000000e+02 1.0430800000e+03 -35 -9 2.680000 3.640000 9.755200 4.5206407965e+00 0 1 0 0 0
2 2.3350400000e+03 9.2196000000e+02 -28 17 10.840000 16.240000 176.041600 1.9525402713e+01 0 1 0 0 0
3 1.1714400000e+03 1.8983200000e+03 -11 -13 1.360000 3.640000 4.950400 3.8859749795e+00 0 1 0 0 0
4 1.9763600000e+03 7.7132000000e+02 -1 24 2.720000 3.640000 9.900800 4.5435990493e+00 0 1 0 0 0
5 1.4536800000e+03 9.8836000000e+02 0 6 9.480000 9.080000 86.078400 1.3128043286e+01 0 1 0 0 0
6 1.8670800000e+03 4.6840000000e+01 0 29 2.720000 1.840000 5.004800 3.2839761925e+00 0 1 0 0 0
7 1.3418000000e+03 1.3346800000e+03 3 1 1.360000 1.840000 2.502400 2.2882317116e+00 0 1 0 0 0
8 8.4920000000e+02 1.4092000000e+03 11 -37 2.720000 3.680000 10.009600 4.5761473489e+00 0 1 0 0 0
9 1.2941200000e+03 1.4436000000e+03 11 -35 8.120000 7.240000 58.788800 1.0879276134e+01 0 1 0 0 0
10 1.7729600000e+03 2.1680000000e+02 14 -33 8.120000 7.240000 58.788800 1.0879276134e+01 0 1 0 0 0
11 2.3908800000e+03 1.3932000000e+03 15 -35 8.120000 7.240000 58.788800 1.0879276134e+01 0 1 0 0 0
12 4.3184000000e+02 1.3987200000e+03 15 -35 4.080000 3.640000 14.851200 5.4676411073e+00 0 1 0 0 0
13 9.9296000000e+02 2.5068000000e+02 15 -29 1.360000 1.840000 2.502400 2.2882317116e+00 0 1 0 0 0
14 1.3512800000e+03 9.4148000000e+02 19 -31 1.360000 1.840000 2.502400 2.2882317116e+00 0 1 0 0 0
15 4.1224000000e+02 1.4221600000e+03 25 -19 2.720000 3.640000 9.900800 4.5435990493e+00 0 1 0 0 0
16 1.7531200000e+03 5.0608000000e+02 32 -9 9.440000 7.280000 68.723200 1.1920651731e+01 0 1 0 0 0;
SummarySpec 5 TESTNO NDEFECT DEFDENSITY NDIE NDEFDIE ;
SummaryList
1 16 0.068681 4988 15;
WaferStatus SSSSSSSSSSSSSSSSSSSSSSSSP ;
EndOfFile;
- Visual Defect map. After KLARF file parser the result should be like this:
- Websockets using. python should be backend for KLARF file parser and JS should be map printer!
Thank you for taking part in this project!