diff --git a/packages/vite/build.config.ts b/packages/vite/build.config.ts
deleted file mode 100644
index f29d9a99..00000000
--- a/packages/vite/build.config.ts
+++ /dev/null
@@ -1,19 +0,0 @@
-import { defineBuildConfig } from 'unbuild'
-
-export default defineBuildConfig({
-  entries: [
-    'src/vite',
-  ],
-  clean: true,
-  declaration: true,
-  externals: [
-    'vite',
-    'vite-plugin-inspect',
-    'vite-plugin-vue-inspector',
-    'execa',
-  ],
-  rollup: {
-    emitCJS: true,
-    inlineDependencies: true,
-  },
-})
diff --git a/packages/vite/esbuild-shims/cjs-shim.ts b/packages/vite/esbuild-shims/cjs-shim.ts
new file mode 100644
index 00000000..57962331
--- /dev/null
+++ b/packages/vite/esbuild-shims/cjs-shim.ts
@@ -0,0 +1,7 @@
+import { createRequire } from 'node:module'
+import path from 'node:path'
+import url from 'node:url'
+
+globalThis.require = createRequire(import.meta.url)
+globalThis.__filename = url.fileURLToPath(import.meta.url)
+globalThis.__dirname = path.dirname(__filename)
diff --git a/packages/vite/package.json b/packages/vite/package.json
index 7024095c..b883bc0a 100644
--- a/packages/vite/package.json
+++ b/packages/vite/package.json
@@ -43,8 +43,8 @@
     "node": ">=v14.21.3"
   },
   "scripts": {
-    "build": "unbuild",
-    "stub": "unbuild --stub"
+    "build": "tsup",
+    "stub": "tsup --watch"
   },
   "peerDependencies": {
     "vite": "^3.1.0 || ^4.0.0-0 || ^5.0.0-0"
diff --git a/packages/vite/tsup.config.ts b/packages/vite/tsup.config.ts
new file mode 100644
index 00000000..3a542fbc
--- /dev/null
+++ b/packages/vite/tsup.config.ts
@@ -0,0 +1,35 @@
+import { defineConfig } from 'tsup'
+
+export default defineConfig({
+  entryPoints: [
+    'src/vite.ts',
+  ],
+  // To avoid esbuild compile import.meta.url to import_meta.url
+  // See: https://github.com/vitejs/vite/issues/503
+  target: 'es2020',
+  clean: true,
+  format: ['esm', 'cjs'],
+  // Force esbuild to use .mjs extension for ESM output
+  outExtension({ format }) {
+    if (format === 'esm') {
+      return {
+        js: '.mjs',
+        dts: '.d.ts',
+      }
+    }
+    else if (format === 'cjs') {
+      return {
+        js: '.cjs',
+        dts: '.d.cts',
+      }
+    }
+    return {
+      js: '.js',
+      dts: '.d.ts',
+    }
+  },
+  // See: https://github.com/evanw/esbuild/issues/1921
+  inject: ['./esbuild-shims/cjs-shim.ts'],
+  dts: true,
+  shims: true,
+})