ANSYS(TM) FEM: multiphysics simulation of MEMS-sensors based on silicon with pizoelectric thin-film layers and etched quartz crystals
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Updated
Jun 19, 2024 - Roff
ANSYS(TM) FEM: multiphysics simulation of MEMS-sensors based on silicon with pizoelectric thin-film layers and etched quartz crystals
stm mems sensors-hal for Android and Linux platforms.
BMFT-Verbundprojekt: Einsatz der Mikromechanik zur Herstellung Frequenzanaloger Sensoren, HSG-IMIT, Villingen-Schwenningen
Papers & Publications
stm mems iio drivers for Android and Linux platforms.
LedBox V3 is an ultimate, sound-reactive LED controller, compatible with 5-12V addressable LED strips (WS281x, SK6812, etc.), supporting 3-(data) and 4-(data/clock) wire signal protocols. Whether you prefer a plug-and-play solution, or you are a maker that loves tinkering with hardware, it offers the best of both worlds.
Analytical & numerical modeling of resonant Silicon Microsensors, invited paper Sensors & Materials
Course program developed by UETP-MEMS (University Enterprise Training Partnership for Micro Electro Mechanical Systems) with the support of the European Programme COMETT (Community Programme for Education and Training in Technology). (C)opyright 1994, UETP-MEMS, FSRM, Switzerland
FASENS-Messprotokolle: optische POLYTEC + elektrische Impedanz/GAIN-PHASE Messungen an Silizium-Strukturen
Dissertation in Physik, Univ. of Bonn
FASENS: POLYTEC + GAIN-PHASE Messungen, Modenprofilaufnahme, Abgriff: optisch, Stahlträger geklebt. Si-Membran + ZnO-Schicht M7-2/3
Silizium-Einfachbalken, GMS-Kraftsensor, Balkenresonator
ANSYS program source listings for MEMS-Sensors
Mikromechanik, MEMS, Mikrosystemtechnik, MST, Halbleiter, Semiconductor, microsystems
BIMORPH : MEMS microactuator based on silicon diaphragm with piezoceramic, Material properties via BIMORPH.MAT, piezo-electric BIMORPH microactuator
BOD-Drucksensor: beam-on-diaphragm silicon sensor, laser-fabricated & anisotropic etched pressure sensor, variable Membrandicken unter Druckbelastung
ANSYS analyses of triple-beam silicon sensors, Silizium-Dreifachstimmgabel, Si(100)
Quartz resonant force sensors, DETF = Double-Ended-Tuning-Fork, ANSYS simulation
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